The Thermo Scientific Meridian 7 system enables visible light laser voltage imaging (LVI) and probing (LVP) as well as dynamic laser stimulation (DLS/LADA) on sub-10nm devices. Not requiring ultra-thin substrates, it preserves the integrity and functionality of the device under test and thus provides a reliable and practical production solution. Additionally, it offers a 25 percent optical resolution enhancement over the previous-generation system and has a smaller spot size for better fault localization.
