Helios 5 EXL DualBeam

The Thermo Scientific Helios 5 EXL DualBeam is a 300mm full-wafer focused ion beam scanning electron microscope (FIB-SEM), which was designed to address TEM sample preparation challenges in the semiconductor industry. The Helios 5 EXL DualBeam has the ability to prepare samples for today’s most advanced process nodes, including sub-5nm and gate-all-around technology.

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