The Verios 5 XHR SEM offers subnanometer resolution over the full energy range from 1 keV to 30 keV with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level. The Verios XHR SEM enables
high resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV. It provides high contrast on sensitive materials with excellent performance down to 20 eV landing energy, high-sensitivity in-column and below-the-lens detectors, signal filtering for low-dose operation as well as optimal contrast selection. Furthermore, it offers greatly reduced time to nanoscale information for users with any experience level, consistent measurement results, flexibility for accessories due to a large chamber, and unattended SEM operation.
Verios 5XHR SEM
